Methods and systems for controlling movement withi

专利名称：Methods and systems for controlling

movement within MEMS structures

发明人：William P. Platt,Burgess R. Johnson申请号：US10360318申请日：20030207

公开号：US20040154397A1公开日：20040812

专利附图：

摘要：A method for reducing undesired movements of proof masses in micro-electromechanical systems (MEMS) devices is described where the proof masses aresuspended above a substrate by one or more suspensions. The method includes

providing an anchor on the substrate substantially between a first proof and suspensionsfor the first proof mass and a second proof mass and suspensions for the second proofmass, coupling a first portion of a beam to the first proof mass, coupling a secondportion of the beam to the second proof mass, and attaching a third portion of the beamto the anchor, the third portion extending between the first portion and second portionof the beam, the anchor and the third portion configured to allow for rotation about anaxis perpendicular to the substrate.

申请人：PLATT WILLIAM P.,JOHNSON BURGESS R.

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